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Supercritical CO2 is a promising zero-surface-tension, highly diffusive solvent, which creates a uniform reaction environment that dissolves low-volatility metal compounds. Here we report a novel etching technique for transition metal (Cu, Ni, Co, and Fe) thin films in supercritical CO2 (scCO2). The metals were removed by reacting with the chelating agent, hexafluoroacetylacetone, by dissolving the...
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