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We report on the optimization of hydrogenated amorphous silicon/crystalline silicon (a-Si:H/c-Si) heterojunction solar cells which were completely processed at temperatures below 230degC. Efficient solar cells based on both n-type and on p-type c-Si substrates were performed. In contrast to the approach from Sanyo no additional a-Si:H(i) buffer layer was used. Instead the conditions of the amorphous...
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