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In this paper we report the first applications of single wall carbon nanotube based micro-optomechanical systems (MOMS). Thin films of nanotubes with line widths ranging less than 1.5 mum and thicknesses ranging from 40 to 700 nm were patterned into micro-mechanical systems using batch fabrication techniques. Arrays of nanotube based MOM actuators, MOM-micromirrors and MOM-micro-grippers were fabricated...
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