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Precision positioning stages with large strokes and high positioning accuracy are attractive for high-performance micro/nano manufacturing. This paper presents the dynamic design and characteristic investigation of a novel XY micropositioning stage. First, the mechanism of the stage was introduced. The XY stage was directly driven by two linear motors, and the X- and Y-axes kinematic decoupling was...
This paper presents the dynamic modelling and performance evaluation methodologies of a flexure-base mechanism for ultra-precision grinding operations. The mechanical design of the mechanism is briefly described. A piezoelectric actuator is used to drive the moving platform. A flexure-based structure is utilized to guide the moving platform and to provide preload for the piezoelectric actuator. By...
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