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This paper presents a novel methodology for position and orientation (pose) measurement of stages used for micro/nano positioning which produce coupled motions with three planar degrees of freedom (DOF). In the proposed methodology, counter-rotation of the entire mechanism prevents the misalignment of the measurement beams within a laser-interferometry-based sensing and measurement technique. To detect...
Multi-function probing systems are of significant importance for characterization of surface properties and in situ surface topography at the micro and nanometer level. This paper presents the mechanical design and parameter optimization of the flexure-based suspension system for multi-function sensing probes. By evaluating several topological structures, the proposed threefold-symmetric beam shows...
This paper focuses on the development of a new high precision micropositioning device that is capable of traveling in translational and rotational motions. The device was modeled via the application of flexural cantilever structure to harness the precision and accuracy in implementing the positioning routine. This attribute is paramount to enable further manipulation procedures such as grasping, injecting,...
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