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We present the first electromagnetic comb drive actuator which allows for over 100μm of linear actuator motion at large air gap widths of 25μm at 300 coil windings, a structural height of 400μm and for an applied current of 8mA. Previously reported designs require very narrow air gaps of 3μm at structural heights of up to 1mm [K. Fischer, H. Guckel, Long throw linear magnetic actuators stackable to...
This work describes the fabrication and characterization of an electromagnetic micro generator array for energy harvesting purposes. The array consists of a magnetic polydimethylsiloxane (PDMS) membrane with 3x3 magnets which is aligned over a PCB with 3x3 coils. Different coil cores are tested and compared. The parameter for comparison is the voltage induced in the coil array by the vibrating membrane...
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