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Reconfigurability in mm-wave circuits and systems become desired in recent years. In this work, the parallel-beam driven actuator is modified in two ways to enhance the tuning capability. In cooperated with the proposed actuator, two V-band frequency-tunable front-end circuits are demonstrated. The bandstop filter is fabricated in 0.35-μm CMOS-MEMS process, providing five-band switching within 51–63...
Reconfigurability in mm-wave circuits and systems become desired in recent years. In this work, the parallel-beam driven actuator is modified in two ways to enhance the tuning capability. In cooperated with the proposed actuator, two V-band frequency-tunable front-end circuits are demonstrated. The bandstop filter is fabricated in 0.35-µm CMOS-MEMS process, providing five-band switching within 51–63...
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