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A recently developed laser terahertz (THz) emission microscope (LTEM) is a new type of inspection tool for semiconductor integrated circuits by 2-D mapping of THz emission excited by femtosecond (fs) laser pulse. For high-resolution imaging, we demonstrate the combination of a hemispherical solid immersion lens (SIL) and an LTEM with transmission-type detection mode. Unlike reflective LTEM geometries,...
As an unique terahertz application, we have been developing a laser terahertz emission microscope (LTEM) for not only a study of basic science but also industrial application such as an inspection tool for semiconductor integrated circuits. In order to establish high resolution system, we employed a high-refractive solid immersion lens and a beam expander in LTEM system, by which a focused beam spot...
A laser terahertz emission microscope (LTEM) technique has become a valuable tool for both of basic science and industrial applications. Because THz radiation properties from semiconductor show physical information including carrier dynamics and thus its mapping allows us to visualize the local electric fields in semiconductor integrated circuits nondestructively. We report recent progress in LTEM...
We developed a transmission-mode scanning probe laser terahertz emission microscope (sp-LTEM). Femtosecond (fs) optical pulses are delivered and focused on the sample by an optical fiber probe with a beam diameter of 5 mum. The transmission-mode sp-LTEM system is superior to the conventional reflection-mode sp-LTEM system in the viewpoint of the signal sensitivity because emitted THz waves can be...
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