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Zirconium thin films have been applied as protective coating films on ceramics by dual frequency oxygen plasma sputtering [Y. Ohtsu et al., Surf Coat Technol, 196 (2005) 81], where they were certified to be effective in modifying the surface state of china and porcelain with the water-repellency and the stoichiometric value of atomic ratio O/Zr in films. However, the deposition rate with the former...
Silicon rubber, PDMS, was irradiated by Ar, Ar/H 2 and Ar/O 2 plasmas to increase the surface wettability to water which was found to increase with the irradiation time for every application of plasma irradiation. The use of Ar/O 2 plasma was found to be particularly effective in enhancing the surface wettability. The aging behavior due to exposure to air, ethanol or water...
Although wall conditioning using Ar glow discharges is occasionally employed to reduce helium and hydrogen retention in the inner walls of the vacuum chamber of nuclear fusion devices, the effect of an Ar glow discharge on the reduction of helium and hydrogen retention has never been systematically investigated. In the present experiment, Ar glow discharges were applied to the stainless steel walls...
The surface roughness and etching properties for polycrystalline Cu irradiated by helium and argon ions were examined. In order to obtain a smooth surface and large etching rate, effects of incident angle and fluence of ion were studied. When the incident angle was 0 o , i.e., perpendicular to the surface, the protuberance with a size of crystal grain was observed both for the cases of He...
In order to increase the electron plasma density and/or temperature in electron cyclotron resonance (ECR) nitrogen plasma, electron acceleration has to be enhanced by reducing the electron collision frequency. One method is to add gas species with a lower electron collision cross-section, compared with the case of nitrogen gas. For this purpose, the helium gas was added into the ECR nitrogen plasma,...
We developed a double slit method in order to reduce droplets that were a problem in pulsed laser deposition (PLD) of tantalum oxide. The tantalum oxide films were deposited using KrF excimer laser ablation of a Ta target in 5mass% O 3 at a pressure of 10Pa. Stoichiometric and dense films with few droplets were obtained at a pressure of 10Pa. Without double slit, as the laser pulses increased,...
Effects of helium ion irradiation on photoluminescence spectrum of porous silicon were investigated. Photoluminescence spectra were measured for silicon prepared by only anodization (porous silicon), by only helium ion irradiation, and by helium ion irradiation before or after anodization. The porous silicon prepared only by anodization showed a photoluminescence spectrum with a peak intensity at...
Carbon nitride film was prepared on silicon substrate by an rf magnetron sputtering with a graphite target. Nitrogen-argon mixture gas was employed. To investigate effect of ion bombardment on film hardness, negative bias voltage was applied on the substrate, and a gas flow ratio of argon to nitrogen was changed. The rf power was kept at 300 or 650W. The film was characterized by XPS, a microhardness...
Silicon oxide bubble layer on silicon wafer was produced by helium ion irradiation followed by oxygen plasma irradiation or thermal oxidation. By the helium ion irradiation, a bubble layer was formed. The thickness and porosity of bubble layer depended on the irradiation condition. By the oxygen plasma irradiation to the bubble layer, only the surface of the bubble layer was oxidized. By the thermal...
In order to reduce helium ash concentration in a core plasma of fusion reactor it has been proposed to place the helium selective pumping metals in the vicinity of the divertor. It is known that metals such as nickel and tungsten may trap helium particles selectively, compared with the fuel hydrogens. In this study, the helium trapping properties of those metals, namely, the dependences of irradiation...
Hydrogen absorption and desorption characteristics in boron films deposited on a graphite liner have been studied. The number of hydrogen atoms absorbed in the films is estimated from a decrease in hydrogen pressure during a hydrogen glow discharge. If was 1.9 10 17 atoms cm 2 in the 1 h discharge after an evacuation of H atoms contained in the original boron films by thermal...
In order to investigate pump-down characteristics of extremely high vacuum, a vacuum chamber made by clean 316L stainless steel treated by both electropolishing and outgassing at 800°C was prepared. This chamber was evacuated by a cryosorption pump. The evacuation time to achieve the extremely high vacuum was shorter than that of an Al alloy chamber with the same size and vacuum system, when the evacuation...
For the removal of power flow to the divertor, active cooling components which consist of plasma facing materials such as CFC and heat sink material such as OFCu have been very rapidly developed. The present CFC/OFCu brazed material for the ITER divertor can endure the heat load of 25 MW/m 2 and 30 s for more than 1000 heat cycles. For the LHD divertor, several graphite/OFCu brazed materials,...
The hydrogen retention properties of SiC converted graphite were investigated by using a technique of thermal desorption spectroscopy, following the hydrogen ion irradiation in ECR ion apparatus. The H 2 desorption spectrum had two peaks at 600 and 800°C, due to the detrappings of Si H and C H bondings, respectively. The amount of retained hydrogen in SiC converted graphite at RT was smaller...
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