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We have proposed the intelligent Si neural probe system which can realize high density and multifunctional recording of neuronal behaviors. In this device, LSI chips such as amplifiers, A/D converters, and multiplexers are integrated on the intelligent Si neural probe. In this paper, we report the development of a novel Si neural probe with microfluidic channels which is the key part of the intelligent...
Micro-machined silicon microelectrodes are useful for obtaining high-density, high-spatial resolution sampling of neuronal activity within the brain, and hold promise for revealing the spatiotemporal dynamics of local circuits. However, the fragile nature of silicon electrodes precludes their application in chronic recordings for a long period of time in which electrodes are repeatedly passed through...
We have newly proposed heterogeneous multi-chip module integration technologies in which MEMS and LSI chips are mounted on Si or flexible substrates using a self-assembly method. A large numbers of chips were precisely and simultaneously self-assembled and bonded onto the substrates with high alignment accuracy of approximately 400 nm. Thick MEMS and LSI chips with a thickness of more than 100 mum...
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