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The boron-doped SnO 2 (BTO) films were prepared by spray pyrolysis. The XRD results shows the preferred orientation of the BTO films changes from plane (110) to (101) as the increasing of boron concentration in SnO 2 , which further leads to the variation of grains shape on the surfaces. The FTIR and Hall-Effect results indicate the solution process: the boron ions prefer to occupy...
Ultrathin polymethylmethacrylate (PMMA) films with a width of 17-59.5 nm have been prepared for X-ray resist by Langmuir-Blodgett (LB) technique on a trough using a steady laminar flowing subphase for monolayer compression. Using a synchrotron radiation (SR) lithography system as an exposure tool, patterns with 0.2 μm critical dimensions have been obtained, limited to the mask used.
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