The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
With the development of ultra-large scale integrated circuits, ruthenium has been used as one of the most promising barrier materials for copper interconnects by replacing the conventional Ta/TaN bilayer film. However, during the polishing process of Ru/Cu structure using KIO4 slurries, the galvanic corrosion of copper could happen due to the large difference of the corrosion potentials between ruthenium...
The Copper (Cu) wiring and barrier layer Ru (Ruthenium) CMP is of vital importance to the performance of microchips. For fabricating Ru-Cu interconnect structures, a serious challenge is the galvanic corrosion of Cu that occurs during Ru chemical mechanical polishing (CMP). Previous work has presented a calculation approach to evaluate the galvanic corrosion of Cu in slurry with KIO4 as the oxidizer...
The crack is a very serious defect in the rotor system. However, compared with any other defects, diagnosis of the rotor crack is more difficult, and its potential harm is similarly very serious. Therefore, it is very urgent and necessary to detect and diagnose the rotor crack effectively. In this paper, an approach of bispectrum analysis based on blind identification of time series model is proposed,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.