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In this letter, a 2 × 2 thermo-optic waveguide-based switch with ultralow power consumption is demonstrated and fabricated using a standard complementary metal-oxide-semi conductor (CMOS) process. The phase arms are suspended by removing adjacent SiO2 and 120 μm of the underlying Si, while leaving a few SiO2 beams to support the suspended phase arms for the purpose of structural strength. As compared...
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