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In this work the results of Linear Raman Spectroscopy experiments on hafnium dioxide (HfO 2 ) thin films deposited by magnetron sputtering using different deposition conditions and post-deposition annealing are reported. Raman bands were identified considering the active symmetry modes expected from a tetragonal or monoclinic phase. The as-deposited HfO x films sputtered from an Hf...
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