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We studied zirconium nitride layers prepared by reactive direct current (dc) magnetron sputtering and synthesized with nitrogen gas flow ranging from 1 to 9sccm (standard centimeter cube per minute) N 2 . We measured their electrical resistivity and recorded their X-ray diffraction patterns as well as their RBS spectra and optical reflectance curves. Thus we could determine their crystallographic...
Non-stoichiometric dc magnetron-sputtered ZrN films on silicon have been optically and electrically characterized through spectral reflectance measurements and a four-probe method, respectively. The deposition of the films was monitored by the nitrogen gas flow which has been increased from 1 to 11sccm. Experimental results show that the reflectivity as well as the electrical resistivity strongly...
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