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The hydrolytic decomposition of CF 4 has been conducted on gallia promoted alumina (Ga-Al oxide) catalysts at 803-903K and 0.1MPa. Steady state activity on 20% Ga-Al oxide was 15 times of that on Ce10%-AlPO 4 catalyst, on which the highest activity has been reported. The catalytic activity was further improved by incorporation of sulfate anion in Ga-Al oxide and by applying sol-gel...
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