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The traditional corrosion methods based on oxidizing and dissolving can't remove oxygen (O) and carbon (C) on GaN effectively. This is because GaN has stronger chemical stability, the strong oxidation chemical reagent like H2O2 can't oxidize GaN surface. In addition the oxide on GaN surface can't be dissolved effectively by the strong acid solution such as HCl or H2SO4. The depuration method for GaN...
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