The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Flexible thin-film solar cells require flexible encapsulation to protect the copper–indium–2 selenide (CIS) absorber layer from humidity and aggressive environmental influences. Tantalum–silicon-based diffusion barriers are currently a favorite material to prevent future semiconductor devices from copper diffusion. In this work tantalum–silicon–nitrogen (Ta–Si–N) and tantalum–silicon–oxygen (Ta–Si–O)...
This paper presents results of a study on an insulating bilayer system for the application of capping surface acoustic wave (SAW) structures with embedded finger electrodes. It consists of a stack of two different layers. A Ta–Si–O film followed by a Ta–Si–N film is deposited by physical vapor deposition (PVD) on top of different substrate materials. Due to the deposition parameters both layers contain...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.