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The technology for multi-spectral infrared sensors is presented. It includes the concept, modeling, experimental results as well as demonstration of an infrared sensor technology capable of low-voltage tuning across the SWIR and MWIR wavelength bands.
Micro-electro-mechanical systems (MEMS)-based tunable optical filters, integrated with an infrared detector, select narrow wavelength bands in either the short-wavelength infrared (SWIR), or the mid-wavelength infrared (MWIR) region of the electromagnetic spectrum. The SWIR microspectrometer is based on monolithic integration of a parallel plate MEMS optical filter with a HgCdTe-based infrared detector...
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