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A new type of antireflective (AR) coating materials with easily tailorable refractive index were successfully prepared by the sol-gel method based on the deposition of colloidal hollow silica nanoparticles (HSNs). HSNs were synthesized using tetraethylorthosilicate (TEOS) as the precursor, and then modified by methyltriethoxysilane (MTES). It is found that the refractive index (n) can be precisely...
A mid-frequency (MF) twin magnetron sputtering system combined with two external solenoid coils was developed to prepare nanocrystalline silicon (nc-Si) thin films. By varying the current strength of solenoid coils, different plasma conditions near substrate surface in an argon discharge were accomplished. Under different coil currents and Ar pressures, nc-Si films were successfully prepared and the...
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