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In this paper, the physical and electrical characteristics of low-temperature-processing hafnium oxide (HfO2) films are studied. A simple cost-effective room-temperature process was introduced to prepare high-k HfO2 dielectrics. A novel technique of direct oxidation of an ultrathin Hf metal by nitric acid, followed by rapid thermal annealing in N2 is demonstrated. The prepared HfO2 gate dielectrics...
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