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We have investigated the microstructure of BxAl1-xN films grown by flow-modulated epitaxy at 1010°C, with B/(B+Al) gas-flow ratios ranging from 0.06 to 0.18. The boron content obtained from X-ray diffraction (XRD) patterns ranges from x=0.02 to 0.09. On the other hand, boron content deduced from the aluminum signal in the Rutherford backscattering spectra (RBS) ranges from x=0.06 to 0.16, closely...
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