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This paper presents an overview of Lead-Zirconate-Titanate (PZT) and PZT-on-silicon MEMS resonator and filter technology at HF and low-VHF frequencies; highlighting the capability for bandwidth tuning, high coupling, high Q, and low-loss filter performance without external impedance matching.
Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with...
This letter reports the design, fabrication, and performance of millimeter-wave transmission lines and devices in a tri-layer thick-copper (Cu) process. Beneath the Cu layers is a low-voltage lead zirconium titanate (PZT) MEMS stackup atop a nitride membrane, on high-resistivity silicon. The 10 μm thick Cu layers enable several transmission-line topologies, and the PZT-MEMS functionality enables tunability...
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