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This paper investigated the effects of temperature on resonance properties of Film Bulk Acoustic Resonator (FBAR) in thickness-stretch mode. Based on the fundamental piezoelastic equations of piezoelectric material, the vibration equation of ideal FBAR under sine excitation voltage is derived. The solution is then obtained by using of the boundary conditions. The series and parallel resonance frequency...
Based on the fundamental piezoelastic theory, the vibration equation of layered FBAR under sine excitation voltage was derived. The unknown constants were calculated with boundary and continuity conditions. The expressions of electrical impedance were obtained from the electrical potential and current. The series and parallel resonance frequency are then calculated when the electrical impedance tends...
This paper investigated the effects of initial stresses on resonance properties of Film Bulk Acoustic Resonator (FBAR) in thickness-stretch mode. Based on the fundamental piezoelastic equations of piezoelectric material with initial stress, the vibration equation of ideal FBAR under sine excitation voltage is derived. The solution is then obtained by using of the boundary conditions. The series and...
Based on Mindlin elastic plate theory, the displacements in layered film bulk acoustic resonators (FBAR) are expanded in power series along the thickness direction. The strain and stress components are obtained with the basic equations of elasticity theory. The variational equations of motion are then derived by Hamilton principle. Next, for the rectangular plate with finite size, the displacements...
With the rapid sophistication of film bulk acoustic resonators (FBAR) technology and increased demands for precision frequency control products, it is natural to make use of the detailed analysis of acoustic waves propagating in the FBAR structures for design and estimating electrical parameters before actual fabrication. To this purpose, it is essential to consider the material viscosity, which is...
The wireless communication technology demands for smaller size, high frequency, high performance, low energy consumption, and low cost RF components. Current products based on dielectric or SAW resonators are not enough either due to the size or the circuit loss. Film bulk acoustic resonators (FBAR) are the latest technology offering small size and high frequency RF components to the fast growing...
The rapid development of wireless communication technology and the clear trend of higher frequency, miniaturization, and integration of RF components have provide opportunities through the research and production of thin film bulk acoustic resonators (TFBAR). In the design of TFBAR products, how to determine the frequency is always the starting point. The thickness-extension type of resonators can...
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