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In this paper, we are introducing a new category of wafer-level micromachined rectangular waveguide devices and illustrate a new transition of these devices to Coplanar Waveguide (CPW) lines for millimeter-wave applications. The 3-D fabrication process used in this paper utilizes a combination of thin film and thick film processes and produces a simple three-mask fabrication process. As a result,...
In this paper, we are introducing the design and fabrication of a monolithic wafer-level micro-machined rectangular waveguide for millimeter-wave applications. The 3D fabrication process used in this study allows for fabrication of both dielectric-filled and air-filled monolithic on-wafer waveguides. To perform the measurement and provide integration option to other types of planar structures, a novel...
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