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This paper describes the use of microdischarges as transducing elements in sensors and actuators. Chemical sensing of gases and liquids, pressure sensing in harsh environments, on-chip pressure regulation, and radiation detection methods are described. The devices targeted for these applications are presented from the perspective of the ease of integration into portable microsystems, with emphasis...
This paper describes progress toward an active tissue-contrast sensing microsystem that can be embedded at the tip of a fine biopsy needle. An analog CMOS chip is integrated with a piezoelectric sensor to reduce the impact of parasitic capacitances and allow differential sensing that will permit deep tissue sampling. The sensor element and the CMOS circuit are fabricated in-house and integrated onto...
This paper describes recent advances in batch-mode micro ultrasonic machining (??USM) and its application to quartz crystal (QC) microstructures. Acoustic emission sensors are used for close monitoring of this batch process. Multi-level AT-cut QC microstructures have been successfully fabricated at a cutting rate >24 ??m/min, which is substantially faster than available options for plasma-based...
This paper describes a two-valve manifold for use in a dual chamber drug delivery device for pain therapy. The scalable manifold is hybrid assembled with piezoelectric stacks to actuate Si valve seats against a glass substrate. The substrate has two inlets and one outlet; a piezoresistive pressure sensor is embedded in the Si near each of these three ports. The sensors, which permit closed loop control...
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