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This paper describes progress toward an active tissue-contrast sensing microsystem that can be embedded at the tip of a fine biopsy needle. An analog CMOS chip is integrated with a piezoelectric sensor to reduce the impact of parasitic capacitances and allow differential sensing that will permit deep tissue sampling. The sensor element and the CMOS circuit are fabricated in-house and integrated onto...
This paper reports a method for integrating and micromachining spherical structures made from materials such as fused quartz that are not amenable to melting or reflow. The 3D-SOULE process combines batch-mode micro ultrasonic machining (μUSM), lapping, and micro electro-discharge machining (μEDM) for creating spherical structures. Micro electro discharge machining is used for creating the stainless...
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