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In our paper, we investigates acoustic properties including temperature coefficient of elasticity (TCE) of fluorine doped silicon oxide (SiOF) films and proposes their application to the temperature compensation of radio frequency (RF) surface acoustic wave (SAW) devices. From the Fourier transform infrared spectroscopy (FT-IR), SiOF films were expected to possess good TCE properties. Then we fabricated...
This paper proposes simple and precise nonlinear simulation techniques for surface acoustic wave (SAW) duplexers, especially for the in-band 3rd order nonlinear distortion, the so-called ‘triple beat’. The simulation model is based on the nonlinearity of SAW stress vs. strain (nonlinear elasticity of SAW), and needs just one nonlinear parameter, which represents the 3rd order nonlinear coefficient...
This paper proposes a precise nonlinear simulation technique for surface acoustic wave (SAW) duplexers, especially for the in-band 3rd order nonlinear distortion, the so-called ‘triple beat’. The model is based on the nonlinearity of SAW stress vs. strain (nonlinear elasticity), and needs just one nonlinear parameter, which represents the 3rd order nonlinear coefficient for the elastic constant. The...
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