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This digest paper reports on the first demonstration of suspended β-Ga2O3 nanostructures and nanomechanical resonators made from single-crystal β-Ga2O3 nanosheets or nanomembranes grown via low pressure chemical vapor deposition (LPCVD) on 3C-SiC epi-layer on Si substrate. These single-crystal β-Ga2O3 drumhead nanomechanical resonators offer robust multimode resonances at frequencies in the range...
Multimode resonators offer new opportunities for resonant sensing with multimodality and enhanced degrees of freedom. This digest paper presents experimental measurements of multimode resonances in ‘dog-bone’-shaped resonators made by Si CMOS-MEMS processes. We have measured >18 modes which include both out-of-plane and in-plane resonances. We compare multimode results from both photo-thermal and...
We report the first demonstration of high-quality (Qi ∼ 2.8−3.2×103)3C silicon carbide photonic crystal nanobeams. With the strong optomechanical coupling (gOM/2π ∼ 100 GHz/nm), we observed clear optical transduction of the thermal mechanical motion of the coupled nanobeams.
This paper explores the role of nanotechnology with focus on nanophotonics in dielectric, metal, and semiconductor inhomogeneous metamaterials and devices for optical communications, information and signal processing, and sensing.
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