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A novel MEMS distributed phase shifter for D-band application is presented, in which the open-ended CPW lines in series with MEMS bridge provides exactly capacitance in order to optimize the instability caused by the MEMS bridge movement and meet the required loaded capacitance. The planar structure of open-ended CPW lines could enhance the reliability and avoid performance degradation because of...
This paper presents an new modeling method that RF MEMS device is divided into some typical structures, which can be considered as different transmission lines and be modeled respectively to get equivalent circuit model of the device by cascading. Applying the modeling method to DMTL, the equivalent circuit model and the relationship between model parameters and physical size are obtained after MEMS...
In this paper, a 5-bit switched-line phase shifter is designed, processed and tested for X-band application, which is based on packaged RF MEMS single-pole double-throw(SPDT) and single-pole four-throw(SP4T) switches to get an compact structure. The design and optimization are carried out by analyzing the non-ideal performance of packaged RF MEMS switches and extracting their circuit model parameters...
An X-band 5-bit MEMS distributed phase shifter with a total area of 19.110 × 2.646 mm2 is presented. Based on the equivalent-circuit model, a novel design method is applied to design the phase shifter. The basis of the method is to optimise the length of the MEMS device while maintaining a certain return loss. The fabricated phase shifter shows average measured insertion loss of -1.54 dB, return loss...
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