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Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom...
This paper reports the first detailed experimental evidence of the phenomena of eigenvalue loci veering and vibration mode localization in microelectromechanical resonator arrays subjected to weak electroelastic coupling. A rapid but continuous interchange of the eigenfunctions associated with the eigenvalues is experimentally observed during veering as the variations in the eigenvalues are studied...
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