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Amorphous silicon quantum dots (Si-QDs) self-aggregated in silicon-rich silicon carbide are synthesized by growing with plasma-enhanced chemical vapor deposition on (100)-oriented Si substrate. Under the environment of Argon (Ar)-diluted Silane (SiH 4 ) and pure methane (CH 4 ), the substrate temperature and RF power are set as 350°C and 120W, respectively, to provide the Si-rich SiC...
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