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Electrical properties of Si-implanted and co-implanted with Mg or Be in semi-insulating GaAs was studied. The Si-implanted MESFETs with and without buried p-layer (formed by Mg or Be) have been fabricated and characterized by their d.c. and r.f. performance. The experimental results showed that the device with a buried p-layer can effectively suppress the substrate leakage current (thus good pinch-off...
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