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This paper describes the development of DC-contact RF-MEMS SPST, SP3T, and SP4T switches implemented with a thin-film cantilever. Using aluminium as the sacrificial layer in the fabrication process, flat cantilevers are realized with a measured actuation voltage of 50~70 V. The SPST switch is used as a building block to realize more complicated SP3T and SP4T switches for use in true-time delay phase...
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