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In order to improve microwave characteristics and the frequency response of the output thermovoltage at X-band, an inline RF MEMS power sensor with the impedance matching and compensating capacitance structures is presented in the paper and the sensor is accomplished with GaAs MMIC process. The measured results show that the reflection loss of the sensor is less than -17 dB and the insertion loss...
The theory, design, fabrication and measurements of a novel structure for measuring the power of microwave signals are presented based on MEMS technology. The advantage of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the novel power sensor is fully compatible...
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