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We have studied the effect of substrate temperature in molybdenum (Mo) back contact deposition on its structural evolution, optical properties, and most importantly, the over-deposited CuIn1−xGaxSe2 solar cell performance. A series of Mo thin films was DC sputtered onto thermally oxidized Si at substrate temperatures from 25°C to 385°C. Real time spectroscopic ellipsometry (RTSE) was performed to...
Polycrystalline CuInSe2 (CIS) thin films ~100 nm thick were deposited using the co-evaporation method onto fused quartz substrates held at three different substrate temperatures (Ts): 450°C, 525°C, and 600°C. The films were characterized with spectroscopic ellipsometry (SE) both from the film side and through the glass. These SE data with both measurement geometries were analyzed together, based on...
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