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The work reported here shows a direct experimental comparison of the sensitivities of AlN solidly mounted resonators (SMR)-based biosensors fabricated with standard metal electrodes and with carbon nanotube electrodes. SMRs resonating at frequencies around 1.75 GHz have been fabricated, some devices using a thin film of multi-wall carbon nanotubes (CNTs) as the top electrode material and some identical...
FBAR devices with carbon nanotube (CNT) electrodes have been developed with the aim of taking advantage of the low density and high acoustic impedance of the CNTs compared to other known materials. The influence of the CNTs on the frequency response of the FBAR devices was studied by comparing two identical sets of devices, one set comprised FBARs fabricated with chromium/gold bilayer electrodes,...
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