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This paper presents fabrication methods using graphene as a membrane that was thermally bonded on top of the CMUT cavity formed by patterned photoresist. The impedance measurement result showed graphene CMUT exhibit high resonance frequency when membrane size remains large. Previously we had also reported such a graphene CMUT with stiction problem caused by a graphene transfer technique. In the newly...
This paper reports an improved method for fabricating CMUT array using nickel electroplating over reflowed photoresist. Previously, a CMUT array using nickel on glass process which is used Doppler velocity sensor is reported [1]. The reported device use TI/Cu as sacrificial layer and nickel electroplating to form the membrane. In the newly reported CMUT, we use nickel electroplating over reflowed...
A flexible capacitive micromachined ultrasonic transducer (CMUT) array with increased effective capacitance from concave bottom electrodes is proposed for ultrasonic imaging. A CMUT can transmit and receive ultrasound by vibrating its membrane like a drum. DC bias is applied to bring the membrane closer to the bottom electrode for increasing its sensitivity. However, most of the developed CMUTs have...
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