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Spurious mode excitation is one of the largest obstacles towards the widespread adoption of piezoelectric MEMS resonator technology. This is in large part due to the lack of a wide-band and computationally efficient simulation solution to model the frequency response of complex 3D geometries. This paper presents the results from a solution to this problem: the Rapid Analytical/FEA Technique (RAFT)...
High performance PZT-on-silicon disk flexure resonators were recently demonstrated with peak |S21| of −1 dB with direct 50 Ω termination, high bandwidth tunability, and high coupling at 22 MHz. This paper explores the performance limits and design optimization of this new resonator in the space of radius and silicon thickness of the (1,1) disk flexure mode. This effort is enabled by the Rapid Analytical/FEA...
This paper presents for the first time a closed form analytical solution for the motional resistance, Rm, of the transverse (1,1) mode of two port disk flexure resonators (DFRs), enabling rapid performance prediction and device optimization. This work is motivated by a recently reported −1 dB peak S21 and 9 Ω motional resistance DFR that has demonstrated the viability of non-traditional flexure based...
Wide bandwidth for an air-coupled piezoelectric micromachined transducer (PMUT) is important to achieve short pulse transmission and reception in pulse-echo imaging with high axial resolution. Here, we report experimental results on an air-coupled PMUT with high displacement sensitivity up to 5500 nm/V, high 3 dB bandwidth of 20.3 kHz, and correspondingly short transmission time of 0.05 ms, achieved...
This paper presents an overview of Lead-Zirconate-Titanate (PZT) and PZT-on-silicon MEMS resonator and filter technology at HF and low-VHF frequencies; highlighting the capability for bandwidth tuning, high coupling, high Q, and low-loss filter performance without external impedance matching.
Bidirectional rotary motion of a millimeter-scale traveling wave ultrasonic motor is demonstrated using solution-deposited thin-film lead zirconate titanate and wafer-scale microelectromechanical system fabrication techniques. Rotation speeds of a motor 3 mm in diameter have been characterized up to 2000 r/min as a function of voltage, phase, and frequency, with power consumption less than 4 mW. Frequency...
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