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An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1 to 3mm using wafer scale MEMS fabrication techniques with lead zirconate...
The authors report demonstrated bi-directional rotary motion of a millimeter scale traveling wave ultrasonic motor (TWUM) using thin film lead zirconate titanate (PZT). Rotation speeds of up to 2300 RPM have been achieved at 10V and less than 10mW. Design, fabrication, and initial testing of the TWUM are described. The low-power, high-torque, zero-power off state rotary motors described here, could...
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