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Spurious mode excitation is one of the largest obstacles towards the widespread adoption of piezoelectric MEMS resonator technology. This is in large part due to the lack of a wide-band and computationally efficient simulation solution to model the frequency response of complex 3D geometries. This paper presents the results from a solution to this problem: the Rapid Analytical/FEA Technique (RAFT)...
This paper presents an overview of Lead-Zirconate-Titanate (PZT) and PZT-on-silicon MEMS resonator and filter technology at HF and low-VHF frequencies; highlighting the capability for bandwidth tuning, high coupling, high Q, and low-loss filter performance without external impedance matching.
Disk-flexure PZT-on-silicon resonators exhibited peak |S21| of 1 dB with insertion loss of 0.92 dB. Ferroelectric tuning of bandwidth (>50%), and coupling (>35%), are demonstrated with an insertion loss penalty of 0.6 dB. Power handling measurements showed less than 1 dB compression up to the +15 dBm limit of the network analyzer. The disk-flexure resonator was monolithically integrated with...
An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1 to 3mm using wafer scale MEMS fabrication techniques with lead zirconate...
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