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In low-pressure capacitive discharges the concept of Nonlinear Electron Resonance Heating (NERH) becomes important to enhance Ohmic dissipation. Particularly in geometrically asymmetric capacitive discharges (generation of a DC self-bias), the nonlinearities of the boundary plasma sheaths lead to a strongly non-sinusoidal radio frequency current. The Fourier spectra of such a current can indicate...
In low-pressure capacitive discharges the radio-frequency modulated plasma sheaths generate a number of highly energetic beam electrons traversing the discharge gap. These electrons are important for sustaining the plasma via ionization. In this work, we investigate the dynamics of these electron beams as well as their effect on the plasma by means of Particle-In-Cell simulations for different process...
In capacitively coupled radio frequency (CCRF) discharges at low pressures the electron heating is dominated by electron interaction with the plasma sheath. Especially the beams of the highly energetic electrons (of which the energy is much higher than the ionization threshold of the background gas), accelerated by the expanding plasma sheaths, play a major role to sustain the plasma. At very low...
Plasma resonance spectroscopy is a well established plasma diagnostic method realized in several designs. One of these designs is the multipole resonance probe (MRP)1. In its idealized geometrically simplified version it consists of two dielectrically shielded, hemispherical electrodes to which an RF signal is applied. A numerical tool is under development, which is capable of simulating the dynamics...
This paper presents a novel industry compatible plasma probe for monitoring systems in dielectric deposition processes. The probe is based on the so called active plasma resonance spectroscopy and allows an extensive evaluation of different important plasma parameters, needed for the supervision and control of the plasma deposition process. Due to its assembly, the probe is insensitive against additional...
With increase of the discharge size and driving frequencies of the capacitively coupled plasmas used in the plasma processing, electromagnetic effects can start to play a significant role in determining plasma homogeneity, a vital property in industrial production. The low plasma pressure normally used in CCPs demands use of the kinetic description for the plasma dynamics, however, such a kinetic...
A diagnostic concept is presented which enables the simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure gas discharges. The proposed method utilizes a radio-frequency driven probe of particular spherical design which is immersed in the plasma to excite a family of spatially bounded surface resonances. An analysis of the measured absorption spectrum...
A particularly important tool to investigate technological plasmas are Particle-in-Cell (PIC) simulations. However, the majority of work in this field deals with low-pressure plasmas. Microplasmas give rise to new challenges for simulation tools and theory. High collision frequencies and the treatment of electron-electron interactions lead to an increase of simulation time by several orders of magnitude...
This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calculated. Starting five decades ago numerous concepts based on this idea have been developed as a promising...
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