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A new generation of thin-film shape memory alloys (SMA) has been developed with less than 2 μm thickness for MEMS microactuator applications. In this study, thin-film TiPdNi SMA was processed using ion beam assisted deposition (IBAD) with and without in situ heat treatment. As-deposited films were found to be amorphous. Postdeposition annealing lead to bulk diffusion of palladium to the substrate...
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