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The effects of phosphorus doping and boron doping on the metal-induced lateral crystallization (MILC) rate have been studied. In the case of phosphorus doping, the MILC rate is very sensitive to the sequence of nickel deposition and doping. Phosphorous doping before the nickel deposition reduced the MILC rate much more than the vice versa. When the nickel removal was between the nickel deposition...
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