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This paper reports an electromagnetic shielded cantilever-tip microwave-probe for conductive-property imaging at micro/nano surface-area. Equipped with an ultra-sharp tip apex (<;50 nm), the probe features small conducting path resistance of Rs<;5Ω and conducting path-to ground capacitance of Ctip≈1pF. These optimal-designed parameters facilitate satisfactory spatial resolution and microwave-signal...
High aspect ratio (< 30:1) ferroelectric structures have potential applications in areas such as tunable photonic crystals, biosensors and miniaturized transducers. Mechanically unconstrained and free standing Pb(Zr0.52,Ti0.48)O3 (PZT) tubes (1??2 microns in diameter) were processed with pre-patterned porous silicon templates using a Liquid Source Misted Chemical Deposition (LSMCD) technique. After...
The non-linearity of silicon capacitive pressure sensors with a single-sided island-diaphragm structure and a diode-quad interface circuit is investigated. Based on the mathematical analysis of the sensor non-linearity, two types of linearization approaches have been developed. The first one uses feedback from the output to control the excitation voltage and, thereby, to adjust the non-linearity of...
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