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We report on a study of p-i-n type single junction solar cells with microcrystalline silicon (/spl mu/c-Si:H) i-layers, deposited entirely in a single chamber, batch-process type RF-PECVD system without load-lock, using the hydrogen dilution method. Conversion efficiency of 5% has been obtained on inexpensive, commercial SnO/sub 2/-coated, 3-mm thick soda-lime glass substrates, using Al back contact...
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