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This paper offers a new approach for specifying the waveforms of driving voltages for a Piezo LEGS motor. A novel idea of coordinate transformation to define the waveforms of driving voltages, based on the motor static model, is presented. This transformation defines driving voltages according to the desired motion of the motor legs in the x- and y-directions. The approach allows a user to first define...
This paper describes FPGA based control system for a piezoelectric motor, commercially available Piezo LEGS motor. Driving voltages waveforms are defined as a combination of linear functions. This definition provides possibility for easy implementation on very simple hardware. Linear functions parameters allow forming of the driving voltages according to desired trajectory of motor's legs. Considering...
A new compliant stage based on 3-PRR kinematic structure is designed to be used as a planar micro positioner. The mechanism is actuated by using piezoelectric actuators and center position of the stage is measured using a dual laser position sensor. It's seen that manufactured mechanism has unpredictable motion errors due to manufacturing and assembly faults. Thus, sliding mode control with disturbance...
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