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The decomposition of triethylgallium (TEGa) and triethylantimony (TESb) on GaSb(100)-(1x3) was studied using temperature programmed desorption (TPD), static secondary ion mass spectroscopy, low energy electron diffraction and X-ray photoelectron spectroscopy. TEGa readily decomposes on the surface below 150K, while TESb does not dissociatively adsorb below 320K. The reactive sticking coefficient of...
The decomposition of trisdimethylaminoantimony (TDMASb) on GaSb(100)-(3x1) was studied using temperature programmed desorption, temperature programmed static secondary ion mass spectroscopy, low energy electron diffraction, and X-ray photoelectron spectroscopy. Multilayers of TDMASb desorb at 220K. TDMASb decomposes on the surface at temperatures below 200K and the dimethylamino ligand desorbs through...
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