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This paper presents the combination of active and passive damping control techniques to increase the vertical tracking bandwidth of a fast nanopositioner for video-speed atomic force microscopy (AFM). The passive damping technique utilizes an inertial counterbalance arrangement to mechanically cancel the low 20-kHz vertical resonant mode of the nanopositioner; and the active control technique employs...
In many conventional atomic force microscopes (AFMs), one of the key hurdles to high-speed scanning in constant-force contact mode is the low-feedback control bandwidth of the -axis loop. This paper presents the design of a fast -nanoposi-tioner to overcome this limitation. The -nanopositioner has its first resonant mode at 60 kHz and a travel range of 5 m. It consists of a piezoelectric...
A XYZ scanner is designed for fast and high resolution atomic force microscopy. The objective of this paper is to achieve a large scanning bandwidth along the X and Y axis of the scanner. Finite element analysis of the designed scanner is reported along with the experimental determination of the dynamics. Both suggest the presence of first resonant modes around 8.8 kHz and 8.9 kHz along the X and...
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