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This work presents a self-powered liquid flow and bubble detection sensor based on the effect of contact-electrification between liquid and solid interface. Charge is driven by the electrostatic induction to flow across outer load without power supply. Single-step fluorocarbon plasma treated PDMS with wrinkle pattern is employed to contact with liquid, which could enhance the electric performance...
This work reports a novel stretchable thin-film generator based on electrification for effectively harvesting body motion energy. It has two working modes, the folding mode and the contact-separation (C-S) mode, under the same circuit connection. Electrospinning PU nanofibers are employed to integrate electrodes, making it not only flexible but also highly stretchable up to 100%. Micro-patterned PDMS...
In this paper, we present a novel fabrication for freestanding solid-state micro-supercapacitor (MSC) with interdigital carbon nanotube (CNT)/nanofibers electrode layer, gold current collector and the solid-state electrolyte-substrate, which, for the first time, combines electrolyte transferring with laser patterning process. With the in-planar electrode and electrolyte-substrate layout, the dimension...
We present a wafer-level fabrication method for triboelectric energy harvester (TEH), which fabricates the TEH completely in batch fabrication process, without any manually assembly step. Finite element method (FEM) simulation was conducted to investigate the open-circuit potential distribution and short-circuit charge distribution. Experimental measurements show that this device can produce 235 mV...
We present a floor-based large-area triboelectric generator. Based on the effect of triboelectrification and electrostatic induction, electricity can be generated when someone steps on the device. The output performance under different situations is investigated and optimized. This new design has plenty potential in harvesting walking energy as well as monitoring the motions of people or animals for...
Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6–7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration...
RF MEMS devices are competitive for handling high frequency microwave signals. In comparison to semiconductor devices, the performance of RF MEMS devices is highly linear, minimizing signal distortion. A contactless piezoelectric RF MEMS switch has been designed and simulated. Due to the use of a contactless design based on variable capacitance the reliability issues affecting contacting-type MEMS...
Silicon carbide absolute capacitive pressure sensors with arrayed sensing membranes was designed and fabricated based on silicon-glass anodic bonding. The sensing membranes consist of multiple layers of SiC/Au/SiC, making the device promising to be applied in corrosive environment. The fabricated sensor was integrated with a capacitor read-out circuit in a size of 22 × 23 × 9 mm3, and then packaged...
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